Managing Heat Loss Around a Wafer Heater for More Stable Operation

https://precision-surface-heat.swiftnestly.com/posts/how-to-control-temperature-in-an-ito-glass-heater-system

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result